Compact multi-process dry vacuum pumps: A100 Series

A100 Series - Changing the rules with an integrated pumping solution

Alcatel Vacuum Technology was the first to introduce a compact dry pump for integration inside semiconductor tools in 1999. Now with hundreds of pumps running for years, the IPUP A100 is a standard for Semiconductor Load lock and Transfer Chambers.

The A100 can also be used for non corrosive applications that require clean vacuum, low noise level and low vibration. Based on the A100 success, a higher pumping speed pump called the A300 was designed for corrosive applications.


Applications IPUP A100 L clean process

• Load-locks
• Transfer chambers
• PVD
• SEM
• Preclean chambers
• Anneal chambers (RTP)

Features

• Direct integration on to wafer processing equipment
• 100 m3/h pumping speed at point of use
• Quiet and clean
• Energy efficient
• Reliable

Benefits

• Elimination of foreline & significant reduction of facilities and hook-up costs
• Can replace up to 500 m³/h remote pumps increasing throughput
• Designed for clean room operation
• Reduces fab energy consumption
• Alcatel field proven multi-stage roots technology.

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