Oil-Free Roughing Pumps

Alcatel Vacuum Technology is a long-term supplier for the semiconductor industry. Based on decade-long experiences in the most demanding semiconductor processes we have extended our offer to clean applications where not only lubricant-free vacuum but also best cleanliness and particle-free operation are required. The contactless and frictionless multistage roots pumps offer optimum uptime and long-term stability paired with minimum cost of ownership.

Our dry pumps are available as small air-cooled solutions which are complemented by large water-cooled dry pumps for large load locks in semiconductor, solar and flat panel applications.

Instrumentation applications include small diaphragm pumps as backing pumps for compact high vacuum systems, medium sized multi-stage roots pumps for general roughing and backing use plus large dry pumps for special applications like recirculation of precious gases.