Dry Pumps For Fast Evacuation Of Large Volumes ADKL Series

Advanced Solutions for Flat Panel Display & Solar Industry

Proven technology

Alcatel Vacuum Technology has developed products dedicated to semiconductor applications for more than 15 years.

As a result, Alcatel capitalizes on this experience to introduce a new high capacity dry pump range.

These pumps are able to meet the most stringent needs of L/L evacuation on FPD, Solar or Industrial applications. Depending on required pumping speed, 2 versions are available: AD30KL and AD70KL.

Features

• Unique automatic boost mode
• Unique automatic stand-by mode
• High atmospheric pumping speed
• Robust pumping mechanism based on proven technology
• No need for N2 shaft seal
• Secondary frame for dry pump (AD70KL only)
• D1 option
• G option

Benefits

• Pumping capacity/footprint is optimized
• Lower energy consumption
• Lower noise level
• Fast pumpdown
• High reliability, low maintanance
• Low CoO
• Low cost and easy maintenance
• Lower energy consumption in stand-by mode
• Lower ultimate vacuum
• Compatibility with corrosive gases or condensable vapors