Loadlock
Based on mastered multi-stage roots technology, Alcatel Vacuum Technology provides a wide range of dry pumps covering all the requirements of 200mm & 300mm Front-End and Back-End applications.
- Light processes: Load Lock, Transfer, Sputtering, PVD, Metrology…
- Medium processes: Etching, Implant, Stripping, RTP...
- Harsh processes: CVDs...