Maglev Hybrid Turbomolecular Pump ATH 500 M

The ATH 500 M provides the ultimate in 5-axis magnetic bearing technology in DN 100 and DN 160 flange sizes. The pump combines integrated electronics with a Holweck stage for good pre-vacuum tolerance and a turbo stage optimised for high gas throughput levels. Through its compact design, the ATH 500 M provides a direct alternative to many conventional ball bearing pumps in the 300 to 700 l/s class.
  

• Ultra high stability over time thanks to the best available bearing technology and a wide process window.
• Freely selectable RPM across a broad rotational speed range for optimal process adjustment.
• Active 5-axis magnetic bearing: no contamination due to lubricants, low noise and low vibration, can be mounted in any position, permanent monitoring of rotor position
• High pre-vacuum tolerance
• High air ingress stability