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Maglev Turbomolecular Pumps
Maintenance-free, high-performance turbo pumps
The ATH-M series are actively controlled, magnetically levitated turbo pumps.
These very sophisticated high performance and extremely robust pumps are recognized as the new reference in the world of large turbomolecular pumps.
Rotor control
Automatic balancing system
This device compensates in real time for any imbalance of the rotor due to accumulation of deposits.
5-axis control
A 5-axis magnetic bearing provides control of the rotor at high speed.
Pump protection
Purge
An inert gas purge is built into the pump. It may be used to prevent corrosive attack or deposition build-up inside the pumps.
