If you need:
There is a pump that has been designed to operate efficiently under these conditions: the MDP 5011.

The MDP offers an ideal pumping solution between turbo and roots pumps. This pump is the only one of its kind on the market.
The MDP 5011 is lightweight and compact making it the ideal dry pump for numerous applications, such as:
One of a kind performance
The MDP offers high pumping performance between 10 mbar and 10-5 mbar and a maximum flow rate of 400 sccm.
High exhaust pressure tolerance
With an exhaust pressure up to 40 mbar, the MDP can allow the use of a less expensive backing pump.
The most robust and reliable pump
With its simple construction, robust rotor and low rotational speed (27,000 rpm), the MDP is robust against accidental air in-rush, shock venting and gyroscopic effects.
On-site maintenance
The MDP 5011 is field maintainable providing lower cost of ownership and increased uptime.
Alcatel has chosen high technology ceramic ball bearings for the MDP 5011 that are lightweight with a low coefficient of friction. These bearings provide high reliability due to low centrifugal forces on the bearing cage and reduced bearing temperature.
The Holweck principle is the basis of the MDP design. This design positions the pump performance between roots-type pumps and turbomolecular pumps.
This high technology pump includes 3 different stages:
