ATH Series
Alcatel offers the ATH series of hybrid turbomolecular pumps with pumping speeds ranging from 30 to 300 l/s. Some models have been optimized for instrumentation or R&D applications while others for heavy cycling applications.
Alcatel's knowledge of hybrid turbomolecular pumps has resulted in the design of the ATH series, optimizing vacuum performance, electronics functionality and reliability.
The ATH series also offers added value through features such as:
- Intermediate vacuum ports
- Efficient integration
To cover a wide range of application requirements, multiple pump monitoring options are available from OEM boards to complete user friendly controllers.
Advantages:
The ATH series hybrid turbomolecular pump incorporates turbomolecular stages with molecular drag stages, resulting in a high pumping speed, high compression ratio, resulting in high exhaust pressure tolerance.
The low rotational speed and the machined rotors of the ATH series make these pumps very robust against unexpected air inrushes, shocks, gyroscopic effects, bearing failures.
The patented designs of the ATH 31 and 300 allow integration of the pumps closer to the application, saving space and money. Additionally, the ATH pumps can be equipped with intermediate vacuum ports to offer application flexibility such as additional pumping capacity, management of a pressure set point or venting.
To control the pump, three types of electronics are available:
- A controller with minimum I/O interface: switches and logical interface,
- A sophisticated controller with a high level communication interface,
- Controller electronics that may be mounted on the pump or integrated into a system.
- Hybrid Turbomolecular Pump ATH 200
- Hybrid Turbomolecular Pump ATH 300
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